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    Title :

    Discussion of tooling solutions for the direct bonding of silicon wafers


    Contributors:
    Aitken, N. (author) / Rogers, T. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 12 , 5 ; 413-417


    Publication date :

    2006-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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