Proposed new tool used to scribe silicon wafers into chips more smoothly than before. New scriber produces surface that appears ductile. Scribed groove cuts have relatively smooth walls. Scriber consists of diamond pyramid point on rigid shaft. Ethanol flows through shaft and around point, like ink in ballpoint pen. Ethanol has significantly different effect for scribing silicon than water, used in conventional diamond scribers.


    Access

    Access via TIB

    Check availability in my library


    Export, share and cite



    Title :

    Smoother Scribing of Silicon Wafers


    Contributors:
    Danyluk, S. (author)

    Published in:

    Publication date :

    1986-09-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English




    Smoother transmission

    Online Contents | 2002


    Smoother Terrain-Machine

    Marklund,B. / Swedish Univ.Of Agricultural Science,SE | Automotive engineering | 1984


    Creating smoother ride

    Fry, Kevin | IuD Bahn | 1998


    FEATURES - Smoother Corsa

    Online Contents | 2000