Proposed new tool used to scribe silicon wafers into chips more smoothly than before. New scriber produces surface that appears ductile. Scribed groove cuts have relatively smooth walls. Scriber consists of diamond pyramid point on rigid shaft. Ethanol flows through shaft and around point, like ink in ballpoint pen. Ethanol has significantly different effect for scribing silicon than water, used in conventional diamond scribers.
Smoother Scribing of Silicon Wafers
NASA Tech Briefs ; 10 , 5
1986-09-01
Miscellaneous
No indication
English
Laser scribing of silicon wafers
NTRS | 1970
|Engineering Index Backfile | 1954
Online Contents | 2002
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Automotive engineering | 1984
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