The measurement and control of motion is increasingly required in automotive and robotics applications, where cheap sensors are highly desirable. In this field silicon technology is a good approach in terms of performance/price ratio since complex functions can be integrated into a single device. A bulk silicon micromachined structure 6.4 mm x 6.4 mm in size was designed and fabricated, which can detect angular acceleration and the displacement due to acceleration of mass by torsion bar.


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    Title :

    The study of silicon bulk micromachined angular acceleration sensor


    Additional title:

    Untersuchung eines mikromechanischen Si-Winkelbeschleunigungssensors


    Contributors:
    Mizuno, J. (author) / Nottmeyer, K. (author) / Amemori, M. (author) / Kanai, Y. (author) / Kabayashi, T. (author)

    Published in:

    JSAE Review ; 21 , 1 ; 79-84


    Publication date :

    2000


    Size :

    6 Seiten, 13 Bilder, 4 Quellen




    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English




    The study of silicon bulk micromachined angular acceleration sensor

    Mizuno,J. / Nottmeyer,K. / Amemori,M. et al. | Automotive engineering | 2000



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    Surface Micromachined Angular Rate Sensor

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