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    Title :

    The study of silicon bulk micromachined angular acceleration sensor



    Published in:

    JSAE review ; 21 , 1


    Publication date :

    2000



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    Unknown


    Classification :

    BKL:    55.20 / 55.20 Straßenfahrzeugtechnik



    The study of silicon bulk micromachined angular acceleration sensor

    Mizuno, J. / Nottmeyer, K. / Amemori, M. et al. | Tema Archive | 2000


    The study of silicon bulk micromachined angular acceleration sensor

    Mizuno,J. / Nottmeyer,K. / Amemori,M. et al. | Automotive engineering | 2000


    Surface micromachined angular rate sensor

    Johnson,J.D. / Zarabadi,S.R. / Sparks,D.R. et al. | Automotive engineering | 1995


    Surface micromachined angular rate sensor

    Johnson, J.D. / Zarabadi, S.R. / Sparks, D.R. | Tema Archive | 1996


    Surface Micromachined Angular Rate Sensor

    Sparks, Douglas R. / Johnson, Jack D. / Zarabadi, Seyed R. | SAE Technical Papers | 1995