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    Title :

    Surface Micromachined Angular Rate Sensor


    Contributors:

    Conference:

    Session; International congress, Sensors and actuators 1995 ; 1995 ; Detroit; MI



    Publication date :

    1995-01-01


    Size :

    7 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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