A CMOS integrated surface micromachined angular rate sensor for automotive applications
Ein integrierter CMOS Surface Micromachined Sensor zur Messung der Winkelgeschwindigkeit fuer Fahrzeuganwendungen.
1997
9 pages
6th European EAEC Congress Cernobbio;97A2IV39;1997;Lightweight and Small Cars,Conf.IV,Advanced Automot.Electronics
Miscellaneous
English
A CMOS integrated surface micromachined angular rate sensor for automotive applications
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