This paper presents the results of a three and a half year research and development project for low cost micromachined gyroscopes. As starting point of this work the application requirements of enhanced automotive applications such as Advanced Driving Assistant Systems (ADAS) are given. Based on these demands the sensor development is carried out. The main development activities with respect to sensor technology and sensor design are described. The main tasks of the project focus on the modelling and design of the sensing element, the development of the readout electronic concept as well as the integrated circuit, the silicon technology, characterisation and measurements, assembly and packaging and finally the in-vehicle field test. While the first sensors were geared for functionality, at latter stages the emphasis was put on compactness and cost for latter production. The final sensor systems consists of a Microelectromechanical System (MEMS) sensor element and an mixed-signal ASIC. The performance of this system was tested under laboratory as well as field conditions. The results are very promising and demonstrate the applicability in field while keeping the overall system cost very low.
Low cost micromachined angular rate sensor for enhanced automotive applications
Mikrotechnischer Winkelsensor zu niedrigem Preis für erhöhte automobile Anwendungen
2005
9 Seiten, 11 Bilder, 1 Tabelle, 7 Quellen
Conference paper
English
A CMOS integrated surface micromachined angular rate sensor for automotive applications
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