A surface micromachined angular rate sensor utilizing a vibrating metal ring structure on a silicon IC has been developed. Substantial signal conditioning circuitry is included on the IC with the vibrating structure. Tests of the sensor demonstrate that its performance is equivalent to that required for implementation of a yaw control system. Vehicle handling and safety are substantially improved using the sensor to implement yaw control.


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    Title :

    Surface Micromachined Angular Rate Sensor


    Additional title:

    Sae Technical Papers


    Contributors:

    Conference:

    International Congress & Exposition ; 1995



    Publication date :

    1995-02-01




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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