A CMOS (Complementary Metal-Oxide-Semiconductor Circuit) integrated surface micromachined angular rate sensor utilizing a vibrating metal ring structure on a silicon IC (Integrated Circuit) has been developed. Substantial signal conditioning circuitry is included on the IC with the vibrating structure. Tests of the sensor demonstrate that its performance is equivalent to that required for implementation of an automotive yaw control system. Vehicle handling, safety and navigation are substantially improved using the sensor to implement yaw and roll control.


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    Title :

    A CMOS integrated surface micromachined angular rate sensor for automotive applications


    Additional title:

    Ein mikromechanisch hergestellter CMOS-Gierwinkelsensor für Kraftfahrzeuganwendungen


    Contributors:
    Sparks, D.R. (author) / Zarabadi, S.R. (author) / Jiang, Q. (author) / Johnson, J.D. (author) / Larson, O. (author) / Chia, M. (author) / Castillo-Borelley, P. (author) / Higdon, W. (author)


    Publication date :

    1997


    Size :

    9 Seiten, 4 Bilder, 9 Quellen


    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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    Surface micromachined angular rate sensor

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    Surface Micromachined Angular Rate Sensor

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