Access

    Access via TIB

    Check availability in my library


    Export, share and cite



    Title :

    The study of silicon bulk micromachined angular acceleration sensor


    Additional title:

    Untersuchung eines mikrosystemtechnischen Beschleunigungssensors.


    Contributors:
    Mizuno,J. (author) / Nottmeyer,K. (author) / Amemori,M. (author) / Kanai,Y. (author) / Zexel,JP

    Published in:

    JSAE Rev. ; 21 , 1


    Publication date :

    2000


    Size :

    6 pages


    Remarks:

    JSAE Rev.;21(2000)1 ;79-84


    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English



    The study of silicon bulk micromachined angular acceleration sensor

    Mizuno, J. / Nottmeyer, K. / Amemori, M. et al. | Tema Archive | 2000



    Surface micromachined angular rate sensor

    Johnson,J.D. / Zarabadi,S.R. / Sparks,D.R. et al. | Automotive engineering | 1995


    Surface micromachined angular rate sensor

    Johnson, J.D. / Zarabadi, S.R. / Sparks, D.R. | Tema Archive | 1996


    Surface Micromachined Angular Rate Sensor

    Sparks, Douglas R. / Johnson, Jack D. / Zarabadi, Seyed R. | SAE Technical Papers | 1995