The measurement and control of motion is increasingly required in automotive and robotics applications, where cheap sensors are highly desirable. In this field silicon technology is a good approach in terms of performance/price ratio since complex functions can be integrated into a single device. A bulk silicon micromachined structure 6.4 mm x 6.4 mm in size was designed and fabricated, which can detect angular acceleration and the displacement due to acceleration of mass by torsion bar.


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    Titel :

    The study of silicon bulk micromachined angular acceleration sensor


    Weitere Titelangaben:

    Untersuchung eines mikromechanischen Si-Winkelbeschleunigungssensors


    Beteiligte:
    Mizuno, J. (Autor:in) / Nottmeyer, K. (Autor:in) / Amemori, M. (Autor:in) / Kanai, Y. (Autor:in) / Kabayashi, T. (Autor:in)

    Erschienen in:

    JSAE Review ; 21 , 1 ; 79-84


    Erscheinungsdatum :

    2000


    Format / Umfang :

    6 Seiten, 13 Bilder, 4 Quellen




    Medientyp :

    Aufsatz (Zeitschrift)


    Format :

    Print


    Sprache :

    Englisch




    The study of silicon bulk micromachined angular acceleration sensor

    Mizuno,J. / Nottmeyer,K. / Amemori,M. et al. | Kraftfahrwesen | 2000



    Surface micromachined angular rate sensor

    Johnson,J.D. / Zarabadi,S.R. / Sparks,D.R. et al. | Kraftfahrwesen | 1995


    Surface micromachined angular rate sensor

    Johnson, J.D. / Zarabadi, S.R. / Sparks, D.R. | Tema Archiv | 1996


    Surface Micromachined Angular Rate Sensor

    Sparks, Douglas R. / Johnson, Jack D. / Zarabadi, Seyed R. | SAE Technical Papers | 1995