Large silicon particles result from controlled pyrolysis of silane. Mixture of 1 percent silane in nitrogen pyrolyzed at 300 degrees C to generate aerosol of silicon seed particles.


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    Title :

    Silane Pyrolysis With Silicon-Seed Aerosol


    Contributors:
    Flagan, R. C. (author) / Alam, M. K. (author)

    Published in:

    Publication date :

    1984-11-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English


    Keywords :



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