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    Title :

    Silicon sheet from silane: first results




    Publication date :

    2002



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English



    Classification :

    BKL:    52.52 Thermische Energieerzeugung, Wärmetechnik / 50.70 Energie: Allgemeines / 52.56 Regenerative Energieformen, alternative Energieformen / 53.36 Energiedirektumwandler, elektrische Energiespeicher



    Chemical-vapor deposition of silicon from silane

    Hsu, G. C. / Lutwack, R. / Praturi, A. K. | NTRS | 1979


    Silane Pyrolysis With Silicon-Seed Aerosol

    Flagan, R. C. / Alam, M. K. | NTRS | 1984


    High-Purity Silicon Seeds for Silane Pyrolysis

    Hsu, G. C. / Rohatgi, N. K. / Morrison, A. | NTRS | 1985



    Recycling Silane

    Lutwack, Ralph | NTRS | 1987