Costly gas purified after use in deposition reactor. Proposed method for recycling silane reduces cost of producing pure silicon for semiconductor devices.


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    Title :

    Recycling Silane


    Contributors:

    Published in:

    Publication date :

    1987-07-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English


    Keywords :


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