Seed particles for fluidized-bed production of silicon made by new contamination-free, economical method. In new method, large particles of semiconductor-grade silicon fired at each other by high-speed streams of gas and thereby break up into particles of suitable size for fluidized bed. No foreign materials introduced, and leaching unnecessary. Method used to feed fluidized-bed reactor for continuous production of high-purity silicon.


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    Title :

    High-Purity Silicon Seeds for Silane Pyrolysis


    Contributors:
    Hsu, G. C. (author) / Rohatgi, N. K. (author) / Morrison, A. (author)

    Published in:

    Publication date :

    1985-06-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English


    Keywords :


    Silane Pyrolysis With Silicon-Seed Aerosol

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