Improved reactor serves as last stage in system processing metallurgical-grade silicon feedstock into silicon powder of ultrahigh purity. Silane pyrolized to silicon powder and hydrogen gas via homogeneous decomposition reaction in free space. Features set of individually adjustable electrical heaters and purge flow of hydrogen to improve control of pyrolysis conditions. Power supplied to each heater set in conjunction with flow in reactor to obtain desired distribution of temperature as function of position along reactor.


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    Title :

    Silane-Pyrolysis Reactor With Nonuniform Heating


    Contributors:

    Published in:

    Publication date :

    1991-06-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English




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