Scraper removes silicon deposits from inner walls of reactor vessel. Scraper supported by gas bearing. Scraper made of non-contaminating material such as quartz or silicon.


    Access

    Access via TIB

    Check availability in my library


    Export, share and cite



    Title :

    Cleaning The Walls of A Silane Reactor


    Contributors:

    Published in:

    Publication date :

    1985-04-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English


    Keywords :


    Fluidized-Bed Silane-Decomposition Reactor

    Iya, Sridhar K. | NTRS | 1991



    SYSTEM FOR CLEANING WALLS OF AQUATIC BASINS

    BERENGUER JEROME | European Patent Office | 2021

    Free access

    Recycling Silane

    Lutwack, Ralph | NTRS | 1987


    Drones for cleaning outer walls of high-rise buildings

    LEE GILL DO | European Patent Office | 2019

    Free access