Scraper removes silicon deposits from inner walls of reactor vessel. Scraper supported by gas bearing. Scraper made of non-contaminating material such as quartz or silicon.
Cleaning The Walls of A Silane Reactor
NASA Tech Briefs ; 8 , 4
1985-04-01
Miscellaneous
No indication
English
Fluidized-Bed Silane-Decomposition Reactor
NTRS | 1991
|Silane-Pyrolysis Reactor With Nonuniform Heating
NTRS | 1991
|NTRS | 1987
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