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    Title :

    Resist evaluation for proton beam writing, Ni mold fabrication and nano-replication


    Contributors:
    Wang, Y. H. (author) / Malar, P. (author) / Kan, J. A. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 20 , 10-11 ; 2079-2088


    Publication date :

    2014-01-01


    Size :

    10 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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