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    Title :

    Proton beam writing a platform technology for high quality three-dimensional metal mold fabrication for nanofluidic applications


    Contributors:
    Kan, J. A. (author) / Shao, P. G. (author) / Wang, Y. H. (author) / Malar, P. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 17 , 9 ; 1519-1527


    Publication date :

    2011-01-01


    Size :

    9 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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