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    Title :

    Proton beam writing: a tool for high-aspect ratio mask production


    Contributors:
    Kan, J. A. (author) / Shao, P. G. (author) / Ansari, K. (author) / Bettiol, A. A. (author) / Osipowicz, T. (author) / Watt, F. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 13 , 5-6 ; 431-434


    Publication date :

    2007-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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