Proton beam writing: a tool for high-aspect ratio mask production
MICROSYSTEM TECHNOLOGIES ; 13 , 5-6 ; 431-434
2007-01-01
4 pages
Article (Journal)
English
DDC: | 629.83 |
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British Library Online Contents | 2008
|Proton beam writing: a platform technology for nanowire production
British Library Online Contents | 2008
|NTRS | 1988
|Engineering Index Backfile | 1950
|NTIS | 1988
|