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    Title :

    Nickel and copper electroplating of proton beam micromachined SU-8 resist


    Contributors:
    van Kan, J. A. (author) / Rajta, I. (author) / Ansari, K. (author) / Bettiol, A. A. (author) / Watt, F. (author)

    Published in:

    Publication date :

    2002-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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