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    Title :

    Ni electroplating on a resist micro-machined by proton beam writing


    Contributors:
    Uchiya, N. (author) / Furuta, Y. (author) / Nishikawa, H. (author) / Watanabe, T. (author) / Haga, J. (author) / Satoh, T. (author) / Oikawa, M. (author) / Ishii, Y. (author) / Kamiya, T. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 9-11 ; 1537-1540


    Publication date :

    2008-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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