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    Title :

    High-aspect-ratio nanoporous membranes made by reactive ion etching and e-beam and interference lithography


    Contributors:
    Divan, R. (author) / Makarova, O. V. (author) / Skoog, S. (author) / Narayan, R. (author) / Sumant, A. V. (author) / Tang, C. M. (author) / Moldovan, N. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 20 , 10-11 ; 1797-1802


    Publication date :

    2014-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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