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    Title :

    Fabrication of a high aspect ratio nanoporous array on silicon


    Contributors:
    Ho, J. Y. (author) / Chang, K. J. (author) / Wang, G. J. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 18 , 11 ; 1849-1856


    Publication date :

    2012-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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