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    Title :

    Fabrication of high-aspect-ratio microstructures using SU8 photoresist


    Contributors:
    Liu, G. (author) / Tian, Y. (author) / Kan, Y. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 11 , 4/5 ; 343-346


    Publication date :

    2005-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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