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    Title :

    Releasing high aspect ratio SU-8 microstructures using AZ photoresist as a sacrificial layer on metallized Si substrates


    Contributors:

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 19 , 11 ; 1863-1871


    Publication date :

    2013-01-01


    Size :

    9 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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