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    Title :

    Slotted capacitive microphone with sputtered aluminum diaphragm and photoresist sacrificial layer


    Contributors:

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 16 , 10 ; 1803-1809


    Publication date :

    2010-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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