Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    High sensitivity and small size MEMS capacitive microphone using a novel slotted diaphragm


    Contributors:

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 15 , 9 ; 1401-1406


    Publication date :

    2009-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    Slotted capacitive microphone with sputtered aluminum diaphragm and photoresist sacrificial layer

    Ganji, B. A. / Majlis, B. Y. | British Library Online Contents | 2010


    A high sensitive MEMS capacitive fingerprint sensor using slotted membrane

    Ganji, B. A. / Nateri, M. S. | British Library Online Contents | 2013


    CMOS integrated elliptic diaphragm capacitive pressure sensor in SiGe MEMS

    Sundararajan, A. D. / Rezaul Hasan, S. M. | British Library Online Contents | 2014


    A Miniature Fiber-Optic Microphone Based on an Annular Corrugated MEMS Diaphragm

    Lu, X. / Wu, Y. / Gong, Y. et al. | British Library Online Contents | 2018


    Development of a MEMS Dual Backplate Capacitive Microphone for Aeroacoustic Measurements

    Martin, David / Liu, Jian / Kadirvel, Karthik et al. | AIAA | 2006