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    Title :

    A polydimethylsiloxane diaphragm integrated with a sputtered thin film NdFeB magnet


    Contributors:
    Zhi, C. (author) / Shinshi, T. (author) / Uehara, M. (author) / Matsutani, A. (author) / Yuito, I. (author) / Takeuchi, T. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 21 , 3 ; 675-681


    Publication date :

    2015-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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