Fabrication of compliant high aspect ratio silicon microelectrode arrays using micro-wire electrical discharge machining
MICROSYSTEM TECHNOLOGIES ; 15 , 5 ; 789-797
2009-01-01
9 pages
Article (Journal)
English
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
British Library Online Contents | 2007
|British Library Online Contents | 2009
|High aspect ratio micromolds for the electroplating of micro electro discharge machining tools
British Library Online Contents | 2010
|Wire Electrical-Discharge Machining Aid
NTRS | 1984
|