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    Title :

    Fabrication of high-aspect-ratio electrode array by combining UV-LIGA with micro electro-discharge machining


    Contributors:
    Hu, Y. Y. (author) / Zhu, D. (author) / Qu, N. S. (author) / Zeng, Y. B. (author) / Ming, P. M. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 15 , 4 ; 519-525


    Publication date :

    2009-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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