Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Fabrication of high-aspect-ratio microscale Ta mold inserts with micro electrical discharge machining


    Contributors:
    Cao, D. M. (author) / Jiang, J. (author) / Meng, W. J. (author) / Jiang, J. C. (author) / Wang, W. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 13 , 5-6 ; 503-510


    Publication date :

    2007-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    Fabrication of high-aspect-ratio microscale mold inserts by parallel μEDM

    Cao, D. M. / Jiang, J. / Yang, R. et al. | British Library Online Contents | 2006


    Fabrication of compliant high aspect ratio silicon microelectrode arrays using micro-wire electrical discharge machining

    Rakwal, D. / Heamawatanachai, S. / Tathireddy, P. et al. | British Library Online Contents | 2009



    Molding of Pb and Zn with microscale mold inserts

    Cao, D. M. / Guidry, D. / Meng, W. J. et al. | British Library Online Contents | 2003


    Fabrication of high-aspect-ratio electrode array by combining UV-LIGA with micro electro-discharge machining

    Hu, Y. Y. / Zhu, D. / Qu, N. S. et al. | British Library Online Contents | 2009