High aspect ratio electrostatic micro actuators using LIGA process
MICROSYSTEM TECHNOLOGIES ; 6 ; 218-221
2000-01-01
4 pages
Article (Journal)
English
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
High-aspect-ratio microstructural posts electroforming modeling and fabrication in LIGA process
British Library Online Contents | 2006
|Production issues for high aspect ratio Lobster-eye optics using LIGA
British Library Online Contents | 2007
|High-aspect-ratio WC-Co microstructure produced by the combination of LIGA and micro-EDM
British Library Online Contents | 2000
|British Library Online Contents | 2009
|British Library Online Contents | 2007
|