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    Title :

    High aspect ratio air core solenoid inductors using an improved UV-LIGA process with contrast enhancement material


    Contributors:
    Lu, H. (author) / Pillans, B. (author) / Lee, J. C. (author) / Lee, J. B. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 13 , 3-4 ; 237-243


    Publication date :

    2007-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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