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    Title :

    Rapid replication of polymeric and metallic high aspect ratio microstructures using PDMS and LIGA technology


    Contributors:
    Kim, K. (author) / Park, S. (author) / Lee, J.-B. (author) / Manohara, H. (author) / Desta, Y. (author) / Murphy, M. (author) / Ahn, C. H. (author)

    Published in:

    Publication date :

    2002-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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