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    Title :

    High-aspect-ratio microstructural posts electroforming modeling and fabrication in LIGA process


    Contributors:
    Yang, H. (author) / Chein, R. (author) / Tsai, T. H. (author) / Chang, J. C. (author) / Wu, J. C. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 12 , 3 ; 187-192


    Publication date :

    2006-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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