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    Title :

    High aspect ratio micromachining by synchrotron radiation direct photo-etching


    Contributors:
    Katoh, T. (author) / Zhang, Y. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 4 , 3 ; 135-138


    Publication date :

    1998-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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