High aspect ratio micromachining (HARM) technologies for microinertial devices
MICROSYSTEM TECHNOLOGIES ; 6 ; 184-188
2000-01-01
5 pages
Article (Journal)
English
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Manufacturing of microstructures with high aspect ratio by micromachining
British Library Online Contents | 2008
|High aspect ratio micromachining by synchrotron radiation direct photo-etching
British Library Online Contents | 1998
|Replication technologies for HARM devices: status and perspectives
British Library Online Contents | 2008
|NTRS | 1988
|NTIS | 1988
|