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    Title :

    Replication technologies for HARM devices: status and perspectives


    Contributors:
    Piotter, V. (author) / Bauer, W. (author) / Hanemann, T. (author) / Heckele, M. (author) / Müller, C. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 9-11 ; 1599-1605


    Publication date :

    2008-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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