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    Title :

    Application of photo-etching of polytetrafluoroethylene induced by high energy synchrotron radiation to LIGA


    Contributors:
    Kido, H. (author) / Kuroki, T. (author) / Okubo, M. (author) / Utsumi, Y. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 19 , 3 ; 301-307


    Publication date :

    2013-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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