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    Title :

    Photoresist application for the LIGA process


    Contributors:
    Chaudhuri, B. (author) / Guckel, H. (author) / Klein, J. (author) / Fischer, K. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 4 , 4 ; 159-162


    Publication date :

    1998-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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