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    Title :

    Fabrication of large area diffraction grating using LIGA process


    Contributors:
    Noda, D. (author) / Tanaka, M. (author) / Shimada, K. (author) / Yashiro, W. (author) / Momose, A. (author) / Hattori, T. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 9-11 ; 1311-1315


    Publication date :

    2008-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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