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    Title :

    Fabrication of a spiral microcoil using a 3D-LIGA process


    Contributors:
    Mekaru, H. (author) / Kusumi, S. (author) / Sato, N. (author) / Shimizu, M. (author) / Yamashita, M. (author) / Shimada, O. (author) / Hattori, T. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 13 , 3-4 ; 393-402


    Publication date :

    2007-01-01


    Size :

    10 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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