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    Title :

    Development of a 3-dimensional LIGA process and application to fabricate a spiral microcoil



    Published in:

    Publication date :

    2009



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    Unknown



    Classification :

    Local classification TIB:    770/5600/8000
    BKL:    53.00 Elektrotechnik: Allgemeines / 53.31 Elektrische Energieübertragung / 52.53 / 53.00 / 53.33 / 53.31 / 53.33 Elektrische Maschinen und Antriebe / 52.53 Kraftwerkstechnik



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