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    Title :

    A new process to fabricate the electromagnetic stepping micromotor using LIGA process and surface sacrificial layer technology


    Contributors:
    Yi, F. (author) / Peng, L. (author) / Zhang, J. (author) / Han, Y. (author)

    Published in:

    Publication date :

    2001-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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