Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Applications of thick Sacrificial-Layer of zinc in LIGA process


    Contributors:
    Huang, X. (author) / Liu, G. (author) / Ying, X. (author) / Wang, J. (author) / Guo, Y. (author) / Kang, C. (author) / Tian, Y. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 9-11 ; 1257-1261


    Publication date :

    2008-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




    A new sacrificial layer method of LIGA technology to fabricate movable part of a gripper

    Yi, F. / Tang, E. / Zhang, J. et al. | British Library Online Contents | 2000


    Polymer micromachining technologies for a table-shaped tactile sensor using thick sacrificial layer

    Lee, J. I. / Shikida, M. / Sato, K. | British Library Online Contents | 2015


    Photoresist application for the LIGA process

    Chaudhuri, B. / Guckel, H. / Klein, J. et al. | British Library Online Contents | 1998


    Silicon IC compatible LIGA mask-fabrication process

    Suzuki, K. / Sugiyama, S. | British Library Online Contents | 1997