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    Title :

    Silicon IC compatible LIGA mask-fabrication process


    Contributors:
    Suzuki, K. (author) / Sugiyama, S. (author)

    Published in:

    Publication date :

    1997-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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