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    Title :

    Fabrication of LIGA mold inserts


    Contributors:
    Bacher, W. (author) / Bade, K. (author) / Matthis, B. (author) / Saumer, M. (author) / Schwarz, R. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 4 , 3 ; 117-119


    Publication date :

    1998-01-01


    Size :

    3 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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