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    Title :

    Swelling of SU-8 structure in Ni mold fabrication by UV-LIGA technique


    Contributors:
    Yi, L. (author) / Xiaodong, W. (author) / Chong, L. (author) / Zhifeng, L. (author) / Denan, C. (author) / Dehui, Y. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 11 , 12 ; 1272-1275


    Publication date :

    2005-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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