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    Title :

    LIGA fabrication of X-ray Nickel lenses


    Contributors:
    Nazmov, V. (author) / Reznikova, E. (author) / Snigirev, A. (author) / Snigireva, I. (author) / DiMichiel, M. (author) / Grigoriev, M. (author) / Mohr, J. (author) / Matthis, B. (author) / Saile, V. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 11 , 4/5 ; 292-297


    Publication date :

    2005-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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